Method for producing high quality thin layer films on substrates

Details Method for producing high quality thin layer films on substrates Method for producing high quality thin layer films on substrates

1992-11-23

1994-04-26

Pianalto, Bernard

Coating processes

Direct application of electrical, magnetic, wave, or...

Pretreatment of substrate or post-treatment of coated substrate

4272552, 4272553, 427294, 427551, 427554, 427582, 427585, 427586, 427596, 427597, B05D 306

Patent

active

053065301

ABSTRACT:
A method for producing high quality, thin layer films of inorganic compounds upon the surface of a substrate is disclosed. The method involves condensing a mixture of preselected molecular precursors on the surface of a substrate and subsequently inducing the formation of reactive species using high energy photon or charged particle irradiation. The reactive species react with one another to produce a film of the desired compound upon the surface of the substrate.

REFERENCES:
patent: 3139362 (1964-06-01), D'Asaro
patent: 3306768 (1967-02-01), Peterson
patent: 4002542 (1977-01-01), Young
patent: 4002545 (1977-01-01), Fehiner et al.
patent: 4038167 (1977-07-01), Young
patent: 4371587 (1983-02-01), Peters
patent: 4474829 (1984-10-01), Peters
patent: 4888203 (1989-12-01), Rothschild et al.
patent: 5017403 (1991-05-01), Pang et al.

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