Method for producing high density sintered silicon nitride(Si.su

Plastic and nonmetallic article shaping or treating: processes – Outside of mold sintering or vitrifying of shaped inorganic... – Including plural heating steps

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264 85, 264570, 264325, 264683, C04B 35584

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056652917

ABSTRACT:
The specification describes a method for producing high density sintered silicon nitride (Si.sub.3 N.sub.4) having a relative density of at least 98%. In a first step, silicon nitride powder is compacted into a desired shape. It is then pre-sintered in a second step, generally, under normal pressure to obtain a presintered body having a relative density of at least 92%. In a third step, the presintered body is subjected to a hot isostatic pressing (HIP) in an inert gas atmosphere of 1500.degree.-2100.degree. C. and of nitrogen gas partial pressure of at least 500 atm. Since the presintering does not require any capsule, it is possible to produce high density sintered Si.sub.3 N.sub.4 of complex configurations. As a sintering aid, Y.sub.2 O.sub.3 --Al.sub.2 O.sub.3 --MgO system sintering aid is particularly effective. To improve the strength of sintered Si.sub.3 N.sub.4, it is effective to add a heat treatment step after the HIP and maintain the temperature of the sintered Si.sub.3 N.sub.4 above 500.degree. C. for a while. Between the second and third steps, the temperature of the presintered body is preferably maintained above 500.degree. C. These temperature controls are effective not only to improve the strength of sintered Si.sub.3 N.sub.4 but also to save the thermal energy and to shorten the production cycle.

REFERENCES:
patent: 4112143 (1978-09-01), Adlerborn
patent: 4196178 (1980-04-01), Iwai et al.
patent: 4264548 (1981-04-01), Ezis
patent: 4296065 (1981-10-01), Ishii et al.
patent: 5445776 (1995-08-01), Honma et al.
Abstract of German Patent 2621523.
Kobe Steel, Ltd., No. 313011, Hot and Cold Isostatic Pressing Equipment, pp. 1-10.
Kobe Steel, Ltd., No. 428090, Hot Isostatic Press, pp.1-6.

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