Method for producing grating images

Details Method for producing grating images Method for producing grating images

2003-06-10

2010-06-29

Lavarias, Arnel C (Department: 2872)

Optical: systems and elements

Diffraction

From grating

C359S573000, C359S900000

Reexamination Certificate

active

07746558

ABSTRACT:
A method for producing a grating image, which has at least one grating field recognizable with the naked eye, in which are disposed grating elements, which are produced by a writing apparatus. In a first procedure step at least one grating element is determined, which completely lies within one working field. Then a sequence of working fields is defined, in which the grating elements are to be produced by the writing apparatus. Finally, the working fields are moved to by a relative movement of a carrier, on which is located a substrate to be inscribed, and the writing apparatus, and the grating elements are written into the substrate with the writing apparatus within the respective working fields.

REFERENCES:
patent: 5101297 (1992-03-01), Yoshida et al.
patent: 5335113 (1994-08-01), Jackson et al.
patent: 2002/0041323 (2002-04-01), Hayashi et al.
patent: 09230122 (1997-09-01), None
patent: WO 9103747 (1991-03-01), None
Rai-Choudhury XP- 002251881, SPIE Handbook for Microlithography, Micromaching and Microfabrication, vol. 1: Microlithography (pp. 1-16, 2-fold).

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