Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1986-01-31
1988-03-08
Newsome, John H.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
B05D 306
Patent
active
047299061
ABSTRACT:
Glow polymerisate layers can be generated on a substrate, starting from hydrocarbons and/or fluorocarbons, by means of a high-frequency, low-pressure glow discharge. Glow polymerisates completely saturated with hydrogen or fluorine are obtained when the glow discharge is carried out in the microwave range between 0.5 and 1.000 GHz and if the amplitude E.sub.0 of the effective field strength in the vicinity of the substrate no greater than 850 V/cm.
REFERENCES:
patent: 3847652 (1974-11-01), Fletcher et al.
patent: 4143949 (1979-03-01), Chen
patent: 4365587 (1982-12-01), Hirose et al.
patent: 4395435 (1983-07-01), Sanpei et al.
patent: 4407852 (1983-10-01), Sapieha et al.
patent: 4429024 (1984-01-01), Ueno et al.
Schreiber et al, Ind. Eng. Chem. Prod. Res. Dev., vol. 17, No. 1, 1978, pp. 27-30.
Kammermaier Johann
Kleeberg Wolfgang
Rittmayer Gerhard
Schulte Rolf-Winfried
Newsome John H.
Siemens Aktiengesellschaft
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