Method for producing fine grained pyrolytic silicon nitride

Details Method for producing fine grained pyrolytic silicon nitride Method for producing fine grained pyrolytic silicon nitride

1980-05-21

1981-09-15

Cooper, Jack

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

423344, 423406, C01B 2106, B05D 512

Patent

active

042898013

ABSTRACT:
Novel fine grained pyrolytic silicon nitride is produced by adding a substantial amount of methane to the normal reactant gases. Silicon tetrafluoride and ammonia in ratios of 60:40 to 10:90 may be employed with additions of methane in amounts equal to from 50 to 500% of the sum of silicon tetrafluoride and ammonia. When these reactant gases are passed over a heated substrate at a low pressure pyrolytic silicon nitride with a grain size of less than about 10 microns results.

REFERENCES:
patent: 3211527 (1965-10-01), Forsyth
patent: 3226194 (1965-12-01), Kuntz
patent: 3565674 (1971-02-01), Boland et al.
patent: 3637423 (1972-01-01), Sestrich
patent: 4036653 (1977-07-01), Jacobson
patent: 4091169 (1978-05-01), Bohg et al.
patent: 4118539 (1978-10-01), Hirai et al.

Affiliated with

Also associated with

Rating

Method for producing fine grained pyrolytic silicon nitride does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for producing fine grained pyrolytic silicon nitride, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for producing fine grained pyrolytic silicon nitride will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-391232