Method for producing electrodes of semiconductor device

Details Method for producing electrodes of semiconductor device Method for producing electrodes of semiconductor device

1994-12-23

1996-04-02

Niebling, John

Electrolysis: processes, compositions used therein, and methods

Electrolytic coating

Treating process fluid by means other than agitation or...

205 99, 205123, 205124, 205157, 205333, C25D 502

Patent

active

055037313

ABSTRACT:
A first pair electrodes consisting of an anode to which a plurality of wiring lines to be anodized are connected and a cathode that is opposed to the anode, and a second pair electrodes for collecting impurities in a forming solution are immersed in a forming solution. A voltage is applied to the plurality of wiring lines in such a manner that at least one of the plurality of wiring lines receives the voltage for a different period than the other wiring lines.

REFERENCES:
patent: 5270229 (1993-12-01), Ishihara
patent: 5359206 (1994-10-01), Yamamoto

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