Method for producing electrically conductive carbon film

Details Method for producing electrically conductive carbon film Method for producing electrically conductive carbon film

1988-08-17

1990-04-24

Konopka, Paul E.

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

427 38, C23C 1400, B05D 306

Patent

active

049197797

ABSTRACT:
A carbon film having a larger electrical conductivity is produced on a substrate by an ion beam method comprising steps of ionizing an organic compound having at least one substituent selected from the group consisting of a carbonyl group, an aldehyde group, an acyl group, an acid anhydride group, an amino group, a nitro group, a hydroxyl group, an alkoxyl group, a thiol group and a halogen or a cluster of said organic compound with an ion beam which accelerates ionized species towards a substrate by an electric field and forming a carbon film on the substrate.

REFERENCES:
patent: 4173090 (1987-12-01), Yokoe et al.
patent: 4795656 (1989-01-01), Mizuguchi et al.

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