Method for producing edge geometry superconducting tunnel juncti

Details Method for producing edge geometry superconducting tunnel juncti Method for producing edge geometry superconducting tunnel juncti

1991-01-18

1992-03-31

Lusignan, Michael

Coating processes

Electrical product produced

Superconductor

427 62, 4274191, 4274192, 357 5, 156643, 20419224, B05D 512, H01L 3900

Patent

active

051006944

ABSTRACT:
Disclosed is a method for fabricating an edge geometry superconducting tunnel junction device comprising two niobium nitride superconducting electrodes (14,28) and a magnesium oxide tunnel barrier (24) sandwiched between the two electrodes. The NbN electrodes are preferably sputter-deposited, with the first NbN electrode deposited on an insulating substrate maintained at about 250.degree. to 500.degree. C. for improved quality of the electrode.

REFERENCES:
patent: 4768069 (1988-08-01), Talvacchio

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