Method for producing crystalline semiconductor film having reduc

Fishing – trapping – and vermin destroying

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437101, 437233, 117 8, 148DIG16, H01L 21336, H01L 2120, H01L 21265

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055500706

ABSTRACT:
A method for producing a semiconductor film, includes the steps of: (a) forming an amorphous semiconductor film on a substrate having a surface with an insulating property; (b) introducing a material for accelerating crystallization of the amorphous semiconductor film into at least a part of the amorphous semiconductor film; (c) crystallizing the amorphous semiconductor film by heating to obtain a crystalline semiconductor film from the amorphous semiconductor film; and (d) oxidizing a surface of the crystalline semiconductor film to form a semiconductor oxide film containing a part of the material for accelerating the crystallization on the surface of the crystalline semiconductor film.

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