Method for producing constant profile sidewalls

Details Method for producing constant profile sidewalls Method for producing constant profile sidewalls

1998-12-16

2000-10-17

McPherson, John A.

Radiation imagery chemistry: process, composition, or product th

Plural exposure steps

430312, G03F 700

Patent

active

061329401

ABSTRACT:
A method of making at least one feature on an object having an upper surface, comprising the steps of:

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patent: 4988609 (1991-01-01), Hashimoto et al.
patent: 5304441 (1994-04-01), Samuels et al.
patent: 5434026 (1995-07-01), Takatsu et al.
patent: 5698377 (1997-12-01), Seino
patent: 5905019 (1999-05-01), Obszarny

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