Method for producing color filter

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Screen other than for cathode-ray tube

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430 20, 430142, 430321, 430324, G03F 900

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053147707

ABSTRACT:
A method for producing a color filter involves (A) forming a photosensitive coating film on an electrically conductive layer formed on a surface of a substrate, and exposing the photosensitive coating film trough a mask having patterns of at least three different degrees of light transmittances; (B) developing and removing a photosensitive coating film portion registering with one of the patterns of smallest and largest degrees of light transmittances for exposing the electrically conductive layer and electrodepositing a colord coating on the exposed electrically conductive layer for forming a colored layer thereon, operation of developing and removing the photosensitive coating film followed by electrodeposition being repeated for the respective patterns of different degrees of light transmittances in sequence of difference in transmittances for producing different colored layers, respectively; (C) selectively forming a metal layer in interstices present between the colored layers, and (D) transcribing the colored layers and the metal layer onto another substrate.

REFERENCES:
patent: 4846556 (1989-07-01), Haneda
patent: 4902592 (1990-02-01), Matsumura et al.
patent: 5214541 (1993-05-01), Yamasita et al.
Hackh's Chemical Dictionary, 4th edition (1972), p. 473, Right Column, Definition of "Onium".
Flagello, et al. "A Single Expose Double Develop (SEDD) Process for Self-Aligned Lithographic Applications," 9 (1989), Microelectronic Engnr 8226, Nos. 1-4, pp. 47-52.

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