Method for producing atomizing nozzle assemblies

Etching a substrate: processes – Adhesive or autogenous bonding of two or more...

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216 56, 216 52, 1566441, B44C 122

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055470947

ABSTRACT:
A nozzle assembly for use in atomizing and generating sprays from a fluid. The nozzle assembly includes two members joined together. In one of the two members are formed one or more nozzle outlets, one or more fluid inlets, and a plurality of channels that form filter passageways. The nozzle outlets discharge fluid jets that impinge on one another to thereby atomize the fluid. Alternatively, an impact element or a vortex-generating structure can be used in the nozzle outlet to atomize the fluid. Methods are also provided for producing the nozzle assembly by forming the inlets, outlets, and/or channels through electrical or chemical etching or other processes that selectively remove material from at least one face of a nozzle assembly member.

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Article by Kurt Peterson entitled Silicon as a Mechanical Material, published in proceedings of the IEEE vol. 70 No. 5, May 1982, pp. 420-456.

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