Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Involving measuring – analyzing – or testing
Patent
1995-12-19
1998-07-28
Gorgos, Kathryn L.
Electrolysis: processes, compositions used therein, and methods
Electrolytic coating
Involving measuring, analyzing, or testing
204164, 205 88, 205124, 205136, 437237, 437239, C25D 1102
Patent
active
057858381
ABSTRACT:
The present invention provides a method for producing an oxide film wherein a sharp-pointed processing electrode is positioned close to the material to be processed in an oxygen-containing gas, and a voltage in the single digit range is impressed across the material and the electrode so that the surface of the material is positive and the electrode is negative thereby causing an electric current to flow across the material and the electrode. The surface of the material reacts electrochemically with oxygen adsorbed on the surface of the material to anodize the surface immediately proximate the electrode. The method makes possible the formation of a patterned oxide film with a resolution of 0.1 .mu.m or less, thus surpassing the limit of conventional oxide film production methods. Processing efficiency and freedom of processing are significantly improved because an arbitrary oxide film pattern can be formed directly on the surface of a material thereby eliminating the use of a large number of complicated production processes.
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Sugimura Hiroyuki
Uchida Tatsuya
Gorgos Kathryn L.
Leader William T.
Nikon Corporation by Hiroyuki Sugimura
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