Method for producing an opto-electronic integrated circuit

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148DIG119, 148DIG120, 357 30, 357 56, 372 50, 437 59, 437133, 437904, 437912, H01L 3118

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049961632

ABSTRACT:
Present invention is to provide a process for producing an opto-electronic integrated circuit comprising a field effect transistor as an electronic device and a photo-diode as an optical device both formed on an InP substrate,

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Albrecht et al., "Monolithically . . . Indium Phosphide Photodiode Junction Field-Effect Transistor . . . ", IEE Conf. Publ., 292, 14th, Part 2, 1988, pp. 9-12.
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Sasaki et al., "Monolithic Pin-HEMT Amplifier . . . ", Electron. Lett., (24) 19, 15 Sep. 1988, pp. 1201-1202.

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