Method for producing an optical recording medium by a chalcogeni

Details Method for producing an optical recording medium by a chalcogeni Method for producing an optical recording medium by a chalcogeni

1985-03-26

1987-02-24

Newsome, John H.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

427166, B05D 306

Patent

active

046456856

ABSTRACT:
Chalcogenide suboxide, particularly tellurium oxides TeOx, are possible to reversibly change optical characteristics by changing power of irradiating light to repeat recording and erasure.
If the TeOx is x<1, high sensitivity is obtained but the characteristic of film is greatly deteriorated due to the environment.
In accordance with this invention there is proposed a film which can be used as an optical recording medium having a high sensitivity and a high stability under the conditions that a partial pressure of oxygen is in the range from 1.times.10.sup.-4 -9.times.10.sup.-3 Torr and a high frequency power for forming a plasma in the range of 50-500 W and wherein the TeOx film is formed by metal tellurium vapor passing through a plasma of oxygen gas.

REFERENCES:
patent: 3971874 (1976-07-01), Ohta et al.
patent: 4287224 (1981-09-01), Heimbach et al.
patent: 4357366 (1982-11-01), Takaoka et al.
patent: 4430366 (1984-02-01), Crawford et al.
patent: 4526802 (1985-07-01), Sato

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