Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Having diverse electrical device
Reexamination Certificate
2006-10-24
2006-10-24
Smoot, Stephen W. (Department: 2813)
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Having diverse electrical device
C438S029000, C438S039000, C438S737000
Reexamination Certificate
active
07125733
ABSTRACT:
A method for producing an emission module having at least two vertically emitting lasers in which an optically active laser layer is arranged on a substrate and at least one upper covering layer is arranged on said laser layer. In a first etching step, upper mesa regions are formed by etching the upper covering layer, wherein the etching depth of the first etching step is chosen such that the first etching step is ended above the optically active laser layer, and the first etching step is carried out such that the resulting distance between adjacent upper mesa regions is so small that the radiation generated by the finished lasers can be coupled directly into a single optical waveguide. In a second etching step, the optically active layer is severed to form lower mesa regions, the second etching step being a wet-chemical or dry-chemical etching step with a predominantly chemical etching component.
REFERENCES:
patent: 5478774 (1995-12-01), Ackley et al.
patent: 5557626 (1996-09-01), Grodzinski et al.
patent: 5877038 (1999-03-01), Coldren et al.
patent: 6046065 (2000-04-01), Goldstein et al.
patent: 6156582 (2000-12-01), Shieh et al.
patent: 6620642 (2003-09-01), Dudoff et al.
patent: 6979582 (2005-12-01), Horng et al.
patent: 2002/0041741 (2002-04-01), Ciemiewicz
patent: 2002/0150135 (2002-10-01), Naone et al.
patent: WO 03/003619 (2003-01-01), None
Eschweiler & Associates LLC
Infineon - Technologies AG
Smoot Stephen W.
LandOfFree
Method for producing an optical emission module having at... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for producing an optical emission module having at..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for producing an optical emission module having at... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3668779