Method for producing an infrared detector

Details Method for producing an infrared detector Method for producing an infrared detector

1992-02-04

1993-03-30

Quach, T. N.

Fishing, trapping, and vermin destroying

437 6, 437160, 437162, H01L 310296, H01L 21385

Patent

active

051983702

ABSTRACT:
In a method of producing an infrared detector, a first conductivity type semiconductor layer, in which lattice vacancies acting as first conductivity type carriers are formed by evaporation of an element during annealing, is formed on a substrate and dopant impurities producing a second conductivity type are diffused in an annealing step from the impurity layer into the first conductivity type semiconductor layer to form pixel regions. During the diffusion, the surface of the first conductivity type compound semiconductor layer corresponding to non-pixel regions is exposed. In the regions of the first conductivity type semiconductor layer which becomes non-pixel regions, the first conductivity type carrier concentration increases due to the lattice vacancies generated by the evaporation of an element and, even when the dopant impurity is diffused into these regions, these regions remain first conductivity type regions.

REFERENCES:
patent: 4559695 (1985-12-01), Baker
patent: 5075748 (1991-12-01), Hisa

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