Method for producing an electronic device having a multi-layer s

Details Method for producing an electronic device having a multi-layer s Method for producing an electronic device having a multi-layer s

1986-12-29

1988-09-13

Weisstuch, Aaron

Fishing, trapping, and vermin destroying

437 4, 437101, 427 39, 427 74, 136258, H01L 2120

Patent

active

047710152

ABSTRACT:
A method for producing an electronic device having a multi-layer structure comprising one or more band gap controlled semiconductor thin layers formed on a substrate comprises forming at least one of said band gap controlled semiconductor thin layers according to the plasma CVD method and forming at least one of the other constituent layers according to the method comprising introducing a gaseous starting material for film formation and a gaseous halogenic oxidizing agent having the property of oxidizing said starting material into a reaction space to effect chemical contact therebetween to thereby form a plurality of precursors including a precursor in an excited state and transferring at least one of these precursors into a film forming space communicated with the reaction space as a feed source for the constituent element of the deposited film.

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