Method for producing air bearing pads for positioning table

Details Method for producing air bearing pads for positioning table Method for producing air bearing pads for positioning table

1982-08-26

1986-02-25

Goldberg, Howard N.

Metal working

Means to assemble or disassemble

Puller or pusher means, contained force multiplying operator

248424, 108137, 108150, 108 67, 269 71, 269285, B21D 5310

Patent

active

045717990

ABSTRACT:
Air bearing pads for supporting a one-axis table in a granite bridge positioning apparatus on a thin film of air include machine-thinned sections for providing resilience to the pads in order to permit flexing sufficient to accommodate surface irregularities on the supporting surface. A single air pressure regulator provides a source of pressurized air to flow-control devices of a plurality of air bearing pads supporting a one-axis table. The individual flow-control devices adjust the flow of air to their respective air bearing pads to individually adjust the lift of the pads.

REFERENCES:
patent: 4129930 (1978-12-01), Dragt
patent: 4234175 (1980-11-01), Sato et al.
patent: 4392642 (1983-07-01), Chitayat

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