Method for producing actuator device

Details Method for producing actuator device Method for producing actuator device

2006-08-09

2010-06-01

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S874000, C029S885000, C029S890100, C204S192170, C310S311000, C310S317000, C310S363000

Reexamination Certificate

active

07725996

ABSTRACT:
A method for producing an actuator device, comprising the steps of: forming a vibration plate on a substrate; and forming a piezoelectric element composed of a lower electrode, a piezoelectric layer, and an upper electrode on the vibration plate, wherein in the step of forming the piezoelectric element, the upper electrode is formed on the piezoelectric layer by sputtering, a temperature of 25 to 250 (° C.) and a pressure of 0.4 to 1.5 (Pa) are used during the sputtering, and upon the sputtering, the upper electrode having a thickness of 30 to 100 (nm), stress of 0.3 to 2.0 (GPa), and specific resistance of 2.0 (×10−7Ω·m) or less is formed.

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