Metal fusion bonding – Process – Bonding nonmetals with metallic filler
Reexamination Certificate
2008-03-25
2010-12-07
Stoner, Kiley (Department: 1735)
Metal fusion bonding
Process
Bonding nonmetals with metallic filler
C228S220000, C228S233200, C228S245000
Reexamination Certificate
active
07845546
ABSTRACT:
Method for producing a vacuum measuring cell having a pressure transducer diaphragm with housing plates sealed on opposite sides to form reference and measuring vacuum chambers. An opening in one plate communicates with the measuring vacuum chamber and has a sealed connection for joining to medium to be measured. The diaphragm and plates are aluminum oxide ceramic and at least one of the seals is aluminum with a thickness of 0.5 μm to 30 μm. The ceramic parts are pressed together at increased temperature of 600° C. to 680° C. in a process gas atmosphere including a reducing gas, during a time of 30 to 90 minutes, and subsequently a tempering step is carried out in a second process gas atmosphere including oxygen, tempering taking place at a temperature of 450° C. to 575° C. such that the metallic aluminum is oxidized into aluminum oxide.
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Bertsch Dietmar
Dietrich Klaus
Onda Nico
West Martin
Inficon GmbH
Nataro, Michalos & Zaccaria P.C.
Stoner Kiley
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