Method for producing a thin film transistor having improved carr

Fishing – trapping – and vermin destroying

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437 24, 437 41, 437162, 437937, H01L 21786

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active

055676332

ABSTRACT:
A polycrystalline silicon film formed of an active layer of a thin film transistor is entirely hydrogenated by a low-temperature process, thereby lowering the resistance and relaxing the electric field in the vicinity of the drain to reduce the leakage current. A gate and an insulating film that covers it are formed on a substrate having an insulating surface. A hydrogenated polycrystalline silicon film is formed over the substrate, including the gate, with the insulating film interposed therebetween. A silicon oxide film pattern is formed on the polycrystalline silicon film directly above the gate. Source/drain regions are formed on the polycrystalline silicon film substantially at two external sides of the silicon oxide film pattern. The source/drain regions are formed from a hydrogen-containing amorphous silicon film, a conductive silicon film and a metal film, which are successively stacked on the polycrystalline silicon film. Accordingly, the hydrogen-containing amorphous silicon film functions as an offset region.

REFERENCES:
patent: 5075237 (1991-12-01), Wu
patent: 5395804 (1995-03-01), Ueda
patent: 5401685 (1995-03-01), Ha
patent: 5403756 (1995-04-01), Yoshinouchi et al.

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