Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1997-09-24
2000-01-11
Speer, Timothy M.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427108, 427109, 4271262, B32B 1700
Patent
active
060133104
ABSTRACT:
A thin film semiconductor device including an insulating substrate; and a structure provided on the insulating substrate and including a silicon layer containing hydrogen diffused therein and a silicon nitride layer. The insulating substrate is formed of an insulating material having a thermal expansion coefficient of 2.6.times.10.sup.-6 deg.sup.-1 or more or having a distortion point of 850.degree. C. or lower.
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Katsuya Yoko
Tsuchimoto Shuhei
Yaoi Yoshihumi
Sharp Kabushiki Kaisha
Speer Timothy M.
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