Method for producing a thin film resistor

Details Method for producing a thin film resistor Method for producing a thin film resistor

1984-01-16

1985-07-23

Bueker, Richard

Coating processes

Electrical product produced

Resistor for current control

427103, 4273833, 338308, B05D 512

Patent

active

045308527

ABSTRACT:
Method for producing a thin film resistor by vapor deposition or cathode sputtering techniques, wherein part of the resistance area of the film is covered by an electrically insulating layer which prevents oxygen diffusion onto the resistance material and causes a decrease of the resistance during aging, while the rest of the resistance area remains free.

REFERENCES:
patent: 4007063 (1977-02-01), Yasuda
patent: 4019168 (1977-04-01), Collins
patent: 4021277 (1977-05-01), Shirn et al.
patent: 4145470 (1979-03-01), Matsuura
patent: 4194174 (1980-03-01), DeLise

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