Metal working – Piezoelectric device making
Patent
1993-08-06
1995-02-21
Hall, Carl E.
Metal working
Piezoelectric device making
310313R, 427100, H01L 4122
Patent
active
053904010
ABSTRACT:
A surface acoustic wave device is so manufactured that it's reliability is increased and so that it is surface-mountable with no requirement for packaging. The surface acoustic wave device (20) has a pair of opposite interdigital electrodes (2a, 2b) and a piezoelectric member (4) in close contact with the interdigital electrodes (2a, 2b). A portion located between the pair of interdigital electrodes (2a, 2b) propagates surface acoustic waves. This device (20) is characterized by an air bridge (13) covering the portion of the piezoelectric member (4) for propagating surface acoustic waves and the pair of interdigital electrodes (2a, 2b). The air bridge (13), may be provided with an insulating film (14) which is not in contact with the piezoelectric member (4).
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Saw Filters Using Zno Thin Films By D. Kirk et al. May 1988 Proc Electronic Components Conf.
Fujimori Naoji
Hachigo Akihiro
Nakahata Hideaki
Shikata Shin-ichi
Fasse W. F.
Fasse W. G.
Hall Carl E.
Sumitomo Electric Industries Ltd.
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