Method for producing a spiral inductance on a substrate, and...

Details Method for producing a spiral inductance on a substrate, and... Method for producing a spiral inductance on a substrate, and...

2006-05-30

2006-05-30

Nguyen, Tuyen T (Department: 2832)

Inductor devices

Coil or coil turn supports or spacers

Printed circuit-type coil

C257S531000, C438S381000

Reexamination Certificate

active

07053747

ABSTRACT:
A device and a method for producing such a device is provided, whereby the windings of a spiral inductance are embedded in a membrane such that they are freely suspended over a completely back-etched area of the substrate for a decoupling of the windings from the substrate. An additional substrate is connected to the bottom side of the back-etched area of the processed substrate such that a hollow cavity is formed for a decoupling of the windings from the substrate.

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patent: 2003/0155617 (2003-08-01), Woo et al.

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