Method for producing a quantum well structure

Details Method for producing a quantum well structure Method for producing a quantum well structure

1991-01-15

1993-02-09

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437107, 437113, H01L 21203

Patent

active

051852870

ABSTRACT:
A method for producing a box type quantum well structure includes generating ion clusters, linearly accelerating the clusters with an electric field, passing the accelerated cluster ions through a further field perpendicular to the accelerating direction, causing the cluster ions to follow different ion orbits in accordance with the number of constituent atoms of the respective cluster ions, intercepting the cluster ions having a predetermined number of atoms with a substrate arranged in the orbit of the cluster ions having a predetermined number of atoms. A neutral particle shielding plate is provided along a straight line between the substrate and the cluster ion source to prevent neutral particles from flowing toward the substrate. Thereby, GaAs boxes having the same size can be obtained and variations in the quantum effects of the boxes can be reduced.

REFERENCES:
patent: 4805555 (1989-02-01), Itoh
patent: 4806502 (1989-02-01), Jorke et al.
patent: 4811690 (1989-03-01), Kawagoe et al.
patent: 4883770 (1989-11-01), Dohler et al.
"The Technical Report of Mitsubishi Denki Kabushiki Kaisha", vol. 60, No. 5, 1986, pp. 53-57.

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