Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2007-06-26
2007-06-26
Kim, Paul D. (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S417000, C029S856000, C029S858000, C029S883000, C073S159000, C073S204110, C073S204260, C156S268000, C156S345420, C156S922000, C257S701000, C257S704000, C427S249300, C427S258000, C427S402000, C427S404000, C438S110000, C438S125000, C438S455000, C438S458000, C438S976000
Reexamination Certificate
active
10821798
ABSTRACT:
In a method for producing a protective cover for a device formed in a substrate, at first a sacrificial structure is produced on the substrate, wherein the sacrificial structure comprises a first portion covering a first area of the substrate including the device and a second portion extending from the first portion into a second area of the substrate including no device. Then a first cover layer is deposited that encloses the sacrificial structure such that the second portion of the sacrificial structure is at least partially exposed. Then the sacrificial structure is removed, and the structure formed by the removal of the sacrificial structure is closed.
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Franosch Martin
Meckes Andreas
Oppermann Klaus-Günter
Infineon - Technologies AG
Kim Paul D.
Maginot Moore & Beck
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