Method for producing a pressure sensor

Adhesive bonding and miscellaneous chemical manufacture – Methods – Surface bonding and/or assembly therefor

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Details

73715, 73724, 3612834, B32B 3126, G01L 114

Patent

active

057762767

ABSTRACT:
In a method for producing a pressure sensor, a ceramic plate is joined to a shaped ceramic part. The shaped ceramic part has a depression. Around the depression there is provided a thick-layer paste which does not completely surround the depression. As a result, the air can escape from the depression during firing and a subatmospheric pressure can thus be enclosed in the depression.

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patent: 4972579 (1990-11-01), Yajima
patent: 4972717 (1990-11-01), Southworth et al.
patent: 5349492 (1994-09-01), Kimura et al.
patent: 5381299 (1995-01-01), Provenzano et al.
patent: 5499158 (1996-03-01), Bishop et al.
patent: 5525280 (1996-06-01), Shukla et al.

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