Method for producing a piezoelectric film actuator

Details Method for producing a piezoelectric film actuator Method for producing a piezoelectric film actuator

2005-09-06

2009-12-29

Banks, Derris H (Department: 3729)

Metal working

Piezoelectric device making

C029S830000, C029S831000, C029S832000, C029S846000, C310S311000

Reexamination Certificate

active

07636993

ABSTRACT:
A method for producing a piezoelectric film actuator is provided. This method includes the steps of preparing an intermediate transfer member having a porous layer formed thereon, with a vibrating plate and a piezoelectric layer being provided on the porous layer; bonding the vibrating plate to a nozzle substrate to form a composite structure; and separating the intermediate transfer member from the composite structure at the porous layer to transfer the vibrating plate and the piezoelectric layer to the nozzle substrate.

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