Method for producing a piezoelectric element

Coating processes – Electrical product produced – Piezoelectric properties

Reexamination Certificate

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C427S376200, C427S376600, C427S383500, C029S025350

Reexamination Certificate

active

07052732

ABSTRACT:
A method for producing a piezoelectric element by superposing a piezoelectric material made of a piezoelectric ceramic composition containing a PbMg1/3Nb2/3O3—PbZrO3—PbTiO3ternary system solid solution composition represented by the general formula Pbx(Mgy/3Nb2/3)aTibZrcO3as a main component, and 0.05 to 10.0 mass % of NiO on a ceramic substrate or on an electrode formed on the ceramic substrate, and subjecting the superposed piezoelectric material to a thermal treatment in an atmosphere where 0.03–0.5 mg/cm3(NiO conversion amount per unit volume of a space in a container) of an atmosphere-controlling material having the same composition as the piezoelectric material is coexisted.

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Ouchi et al., “Piezoelectric Properties of Pb(Mg1/3Nb2/3)O3-PbTiO3-PbZrO3 Ceramics Modified with Certain Additives”, Journal of American Ceramic Society, vol. 49, No. 11, Nov. 21, 1966.
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