Method for producing a photomask

Details Method for producing a photomask Method for producing a photomask

1974-10-09

1976-06-01

Powell, William A.

Gas separation: apparatus

Electric field separation apparatus

Electrode cleaner, apparatus part flusher, discharger, or...

96 362, 96 383, 156 13, 156 15, 252 792, 252 793, 252 795, 355125, 355133, G03C 500, C09K 1308, G03B 2700, G03C 1100

Patent

active

039605604

ABSTRACT:
A method for producing a photomask, by exposing and development-processing a photographic material including a transparent support having thereon a masking layer and a silver halide emulsion layer to thereby form a silver image, etch-bleaching the silver halide emulsion layer to thereby remove the silver image areas, baking the remaining non-silver image areas to thereby decompose the binder contained therein, subjecting the coated support to etching to thereby remove the masking layer located at the areas corresponding to the silver image, and removing the decomposed binder to thereby uncover the masking layer at the areas corresponding to the non-silver image areas.

REFERENCES:
patent: 3561963 (1971-02-01), Kiba
patent: 3567446 (1971-03-01), Gleadle
patent: 3567447 (1971-03-01), Chand
patent: 3669665 (1972-06-01), Faigenbaum et al.
patent: 3674492 (1972-07-01), Goldrick et al.
patent: 3744904 (1973-07-01), Loprest et a.
patent: 3765901 (1973-10-01), Schellekens et al.

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