Method for producing a photomask

Details Method for producing a photomask Method for producing a photomask

1976-06-09

1978-09-12

Powell, William A.

Gas separation: apparatus

Electric field separation apparatus

Electrode cleaner, apparatus part flusher, discharger, or...

96 362, 96 383, 96 60R, 156643, 156656, 156657, 156659, 20412965, 204192E, 204192EC, 204192P, 252 792, 252 793, G03C 532, C23F 100, G03B 2700, G03C 1100

Patent

active

041134869

ABSTRACT:
A method for producing a photomask, which comprises exposing and development-processing a photographic light-sensitive material comprising a transparent support having thereon a masking layer and a silver halide emulsion layer to thereby form a silver image, bleaching the silver image with a bleaching solution containing hexavalent chromium ion, heating in the presence of oxygen to imagewise uncover the masking layer, etching away the uncovered masking layer, and then removing the emulsion layer at the non-image areas to uncover the masking layer corresponding to the non-image areas.

REFERENCES:
patent: 3474021 (1969-10-01), Davidse et al.
patent: 3561963 (1971-02-01), Kiba
patent: 3567447 (1971-03-01), Chand
patent: 3639125 (1972-02-01), Chand
patent: 3669665 (1972-06-01), Faigenbaum et al.
patent: 3674492 (1972-07-01), Goldrick et al.
patent: 3761260 (1973-09-01), DE Ramaix
patent: 3765901 (1973-10-01), Schellekens et al.
patent: 3870520 (1975-03-01), Shimamura et al.

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