Method for producing a nitride semiconductor element

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Compound semiconductor

Reexamination Certificate

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Details

C438S022000, C438S034000, C438S047000, C438S455000, C438S458000, C438S459000

Reexamination Certificate

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06916676

ABSTRACT:
A method of producing an efficient nitride semiconductor element having an opposed terminal structure. The method includes a growing step for growing the nitride semiconductor further having an undoped GaN layer on a different materials substrate; subsequently, an attaching step for attaching the supporting substrate to the first conductive type nitride semiconductor layer side of the nitride semiconductor and interposing a first terminal between them; and subsequently, an exposing step for exposing the second conductive type nitride semiconductor layer by eliminating the different material substrate and the undoped GaN.

REFERENCES:
patent: 9-8403 (1997-01-01), None
patent: 09-129932 (1997-05-01), None
patent: 10-117016 (1998-05-01), None
patent: 11-214744 (1999-08-01), None
patent: 2000-196152 (2000-07-01), None
patent: 2001-284641 (2001-10-01), None
patent: 2001-298214 (2001-10-01), None
patent: 2001-313422 (2001-11-01), None

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