Method for producing a modulated grating for an optimal...

Details Method for producing a modulated grating for an optimal... Method for producing a modulated grating for an optimal...

2011-03-22

2011-03-22

Booth, Richard A. (Department: 2812)

Semiconductor device manufacturing: process

Including control responsive to sensed condition

Optical characteristic sensed

C438S029000, C438S032000

Reexamination Certificate

active

07910384

ABSTRACT:
Method for producing a modulated grating for an optimal reflection spectrum, which grating is a multiple wavelength reflector. The method includes the following steps: a) Determining wavelengths to be reflected b) Calculating a preliminary grating c) Comparing the reflection spectrum ro(f) with the characteristics of the wanted modulated grating d) Differences lead to a directional change of ro(f) e) Calculating a target function G(z) f) Changing the grating (zk) depending on the real and imaginary part of G(z) g) Repeating steps c) to f) until the grating reflects the predetermined wavelengths.

REFERENCES:
patent: 7083995 (2006-08-01), Sakata
patent: 2004/0001671 (2004-01-01), Liu et al.
patent: 2005/0018964 (2005-01-01), Chen
patent: 0847116 (1998-06-01), None
patent: WO 0054080 (2000-09-01), None
patent: WO 03010586 (2003-02-01), None

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