Active solid-state devices (e.g. – transistors – solid-state diode – Incoherent light emitter structure – In combination with or also constituting light responsive...
Patent
1995-04-07
1997-06-10
Saadat, Mahshid
Active solid-state devices (e.g., transistors, solid-state diode
Incoherent light emitter structure
In combination with or also constituting light responsive...
257777, 438128, 438460, H01L 2715, H01L 3112, H01L 31153, H01L 3300
Patent
active
056378858
ABSTRACT:
The invention relates to a method for producing a microsystem and from it forming a microsystem laser, which preferably has a vertical structural element by contacting of wafer plates, which carry different functional elements of a system, so that this system on the one hand thus includes heterogeneous functions such as actuators, optics, sensors, cooling systems, micromechanics and electronics, and on the other hand, the wafer carrying these functions permits a relatively homogeneous processing of quite similar functions integrated each on one wafer, so that the complexity of the system is created for the first time for the vertical arrangement of these functions.
REFERENCES:
patent: 5051865 (1991-09-01), Kato
patent: 5434434 (1995-07-01), Kasahara et al.
Heinemann Stefan
Mehnert Axel
Peuser Peter
Schmitt Nikolaus
Seidel Helmut
Clark S. V.
Deutsche Aerospace AG
Saadat Mahshid
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