Method for producing a membrane

Details Method for producing a membrane Method for producing a membrane

2011-02-08

2011-02-08

Kim, Paul D (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S592100, C029S609100, C264S320000, C264S544000, C381S396000, C381S398000

Reexamination Certificate

active

07882612

ABSTRACT:
A method for producing a membrane for a device, e.g. a microphone, includes providing a substrate is provided on which a counter electrode is disposed. A sacrificial layer is provided on a surface of the counter electrode facing away from the substrate. The surface of the sacrificial layer facing away from the counter electrode is structured to form a plurality of recesses in the surface to define one or several antistick elements and one or several corrugation grooves at the same time. Subsequently, a membrane material is deposited on the structured surface of the sacrificial layer. Then, the sacrificial layer is removed to form the membrane, which has one or several corrugation grooves and one or several antistick elements.

REFERENCES:
patent: 5194402 (1993-03-01), Ehrfeld et al.
patent: 5576250 (1996-11-01), Diem et al.
patent: 6724058 (2004-04-01), Aigner et al.
patent: 7502482 (2009-03-01), Dehe et al.
patent: 1703932 (2005-11-01), None
patent: 0238491 (2002-05-01), None
Zou Quanbo et al., Fabrication of a Novel Structural Miniature Silicon Condenser Microphone, article, Feb. 1997, vol. 25, No. 2, China Academic Journal Electronic Publishing House, China.

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