Optical waveguides – Integrated optical circuit
Patent
1994-09-13
1995-12-12
Healy, Brian
Optical waveguides
Integrated optical circuit
385 31, 385 39, 385 49, 385 88, 385 92, 385 94, 264 124, 264 125, 437 51, 437211, 437219, G02B 612, B29D 1100, H01L 2170
Patent
active
054757754
DESCRIPTION:
BRIEF SUMMARY
FIELD OF THE INVENTION
The present invention relates to a method for producing a hybrid integrated optical circuit.
BACKGROUND OF THE INVENTION
A method is already known in which a glass fiber is coupled to a waveguide which has been inserted into an indium phosphide chip. In order to be able to couple the glass fiber in an adjusted state to the waveguide prepared for coupling, it is necessary to etch a V-shaped trench into the indium phosphide chip. Furthermore, the adjustment of the glass fiber must be done manually under a microscope so that the coupling losses occurring due to defective adjustment are kept as low as possible. (M. Hamacher, A novel fibre/chip coupling technique with an integrated strain relief on InP, ECOC 92, Berlin, pages 537 fl.) This method is time-consuming and expensive and cannot be applied to mass production.
Furthermore, a method is known in which a laser chip is adjusted on an integrated optical circuit with respect to waveguides with the aid of spacers and adjusting devices. However, this method requires the laser chip to be structured by means of etching operations for the purpose of holding the spacers and the adjusting devices. Furthermore, the spacers and the boundaries must be applied to the integrated optical circuit. This is very expensive however, since the spacers and the adjusting devices have to be produced and positioned with high accuracy. In addition, the laser chip must be inserted manually into the adjusting devices. (Jackson, Flip/Chip, Self-Aligned, Optoelectronic Transceiver Module, ECOC 92, Berlin, pages 329 ff.).
SUMMARY OF THE INVENTION
The method according to the present invention has the advantage that the adjustment of the electrooptic semiconductor component to the waveguide and the adjustment of the waveguide to the optical waveguide is performed without additional outlay when molding the basic unit, which consists of the electrooptic semiconductor component and the molded polymer. A time-consuming manual adjustment is thereby avoided.
The production of differently constructed integrated optical circuits is possible by using a molding tool which can be produced galvanically in many shapes simply and cost-effectively. The simple molding operation, in which the electrooptic semiconductor component is coupled in a self-adjusting fashion to the waveguide trench, is suitable for automated mass production. Integrated optical circuits can thereby be produced cost-effectively.
It is particularly advantageous that the side walls of the holding devices of the molding tool according to the present invention, which bound the space for the electrooptic semiconductor component to be accommodated, and the side walls of the electrooptic semiconductor component extend inwards in a beveled fashion. As a result, the sides of the holding device and those of the electrooptic semiconductor component slide against one another during the insertion of the electrooptic semiconductor component. The area for holding the electrooptic semiconductor component decreases continuously with decreasing distance from the molding tool, as a result of which the insertion of the electrooptic semiconductor component into the holding devices is simplified and a self-adjustment of the electrooptic semiconductor component is performed during insertion. As a result, electrooptic semiconductor components having a relatively large tolerance in the dimensions can be coupled to the waveguide trench with a minimum adjustment error.
It is particularly advantageous for the basic unit and an optical waveguide according to the present invention to be permanently connected to one another with the aid of a cover, preferably made from polymer, the waveguide trench being filled with an optically conductive, relatively high-index material, preferably with polymer. The cover has self-adjusting holding devices for the adjustment of the optical waveguide. A waveguide is produced in this way accompanied by filling the waveguide trench with a polymer. At the same time, the polymer is used to connect the c
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Kragl Hans
Rech Wolf-Henning
Healy Brian
Robert & Bosch GmbH
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