Chemistry of inorganic compounds – Silicon or compound thereof – Binary compound
Patent
1998-11-30
2000-02-22
Shaver, Paul F.
Chemistry of inorganic compounds
Silicon or compound thereof
Binary compound
C07F 708, C01B 3304
Patent
active
06027705&
ABSTRACT:
A method for producing tri- or higher-silane from mono- or lower-silane characterized by reacting a lower silane in the first reaction zone and reacting a portion or all of the reaction product thereof in a reaction zone of the second or subsequent reaction zone.
REFERENCES:
patent: 4950373 (1990-08-01), Sundermeyer et al.
patent: 5089244 (1992-02-01), Parent et al.
patent: 5252766 (1993-10-01), Sakakura et al.
Kitsuno Yu
Matsuhira Shinya
Nakajo Tetsuo
Tazawa Syoichi
Yano Kotaro
Shaver Paul F.
Showa Denko K.K.
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