Method for producing a higher silane

Chemistry of inorganic compounds – Silicon or compound thereof – Binary compound

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C07F 708, C01B 3304

Patent

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06027705&

ABSTRACT:
A method for producing tri- or higher-silane from mono- or lower-silane characterized by reacting a lower silane in the first reaction zone and reacting a portion or all of the reaction product thereof in a reaction zone of the second or subsequent reaction zone.

REFERENCES:
patent: 4950373 (1990-08-01), Sundermeyer et al.
patent: 5089244 (1992-02-01), Parent et al.
patent: 5252766 (1993-10-01), Sakakura et al.

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