Chemistry of inorganic compounds – Silicon or compound thereof – Binary compound
Reexamination Certificate
2011-03-15
2011-03-15
Johnson, Edward M (Department: 1793)
Chemistry of inorganic compounds
Silicon or compound thereof
Binary compound
C423S344000
Reexamination Certificate
active
07906094
ABSTRACT:
Methods for the production of trisilane from the pyrolysis of disilane in a single reactor.
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Borzio John P.
Bourasseau Cyril
Jursich Gregory M.
Mitchell, Jr. Donald W.
Moncur Thomas K.
Air Liquide Electronics U.S. LP
American Air Liquide Inc.
Johnson Edward M
L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des
McQueeney Patricia E.
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