Active solid-state devices (e.g. – transistors – solid-state diode – Thin active physical layer which is – Heterojunction
Patent
1993-12-17
1996-04-16
Crane, Sara W.
Active solid-state devices (e.g., transistors, solid-state diode
Thin active physical layer which is
Heterojunction
257 94, 257103, 257201, 257627, 257628, H01L 2906
Patent
active
055085229
ABSTRACT:
A method for fabricating a semiconductor thin film is disclosed. The method includes the step of epitaxially growing a semiconductor layer made of a group II-VI compound semiconductor to have a thickness of at least one atomic layer or more, on a main plane of a single-crystal semiconductor substrate, the semiconductor substrate having one of a diamond structure and a zinc blende structure, the main plane being inclined by an angle in the range of 2 to 16 degrees with respect to a (100) plane.
REFERENCES:
patent: 4987472 (1991-01-01), Endo et al.
patent: 5016252 (1991-05-01), Hamada et al.
Haase, M. A., et al.,"Blue-green laser diodes" Appl. Phys. Lett. (1991) 59(11): 1272-1274.
Ichino, K., et al., "Design and fabrication of II-VI semiconductor heterostructures" OYO BUTURI (A monthly publication of The Japan Society of Applied Physics) (1992) 61(2): 117-125.
Hirata Shinya
Kitagawa Masahiko
Nakanishi Kenji
Tomomura Yoshitaka
Crane Sara W.
Sharp Kabushiki Kaisha
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