Method for producing a glass thin film with controlloing an oxid

Glass manufacturing – Processes of manufacturing fibers – filaments – or preforms – With measuring – controlling – sensing – programming – timing,...

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65386, 65430, 65 174, 65 605, 65 608, C03B 37018

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active

055036503

ABSTRACT:
A method of producing an oxide glass thin film includes a process to obtain a transparent glass film, in which volatilization of additives in a porous film deposited is effectively suppressed and which can provide an oxide glass thin film having a desired arrangement of refractive index with a low optical loss. The method is for producing an oxide glass thin film, in which glass fine particles mainly containing SiO.sub.2 with additives are deposited on a substrate to form a porous thin film and then heated to form a transparent glass film. In the method, vapor of oxides of additive components is mixed in an atmosphere in which the porous thin film is heated to form the transparent glass film, whereby stopping the volatilization of the additives in the porous film deposited, preventing diffusion of the additives added to a core layer, and preventing the volatilization of glass transition temperature lowering components of additives (P.sub.2 O.sub.5, B.sub.2 O.sub.3, GeO.sub.2, etc.). By these, a desired arrangement of refractive index may be obtained, and an oxide glass thin film may be obtained while lowering the optical loss such as the optical scattering, which could be caused by bubbles in an unsintered portion.

REFERENCES:
patent: 3653862 (1972-04-01), Lynch
patent: 3801294 (1974-04-01), Schultz
patent: 3954431 (1970-05-01), Fleming
patent: 4597787 (1986-07-01), Jacobson
patent: 4642129 (1987-02-01), Douklias
patent: 4787927 (1988-11-01), Mears
patent: 4799946 (1989-01-01), Ainslie
patent: 5039325 (1991-08-01), Miller
Introduction to Ceramics, 2nd ed., Kingery et al., 1976, pp. 402-403, Wiley.

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