Method for producing a ferroelectric thin film

Details Method for producing a ferroelectric thin film Method for producing a ferroelectric thin film

1995-05-23

1998-02-03

King, Roy V.

Coating processes

Electrical product produced

Condenser or capacitor

427 79, 4271263, 4272481, 4272557, 427314, 4274193, B05D 512, C23C 1640

Patent

active

057141940

ABSTRACT:
A method for producing a ferroelectric thin film according to the present invention includes the steps of: forming a PbTiO.sub.3 film on an electrode provided on a substrate; and forming a PZT film on the PbTiO.sub.3 film by a CVD method.

REFERENCES:
patent: 4792463 (1988-12-01), Okada et al.
patent: 5198269 (1993-03-01), Swartz et al.
patent: 5271955 (1993-12-01), Maniar
patent: 5316579 (1994-05-01), McMillan et al.
Yamaguchi et al, Appl. Phys. Lett. 55(15) Oct. 1989 pp. 1581-1582.
Gao et al, J. Appl. Phys. 71(5) Mar. 1992, pp. 2333-2337.
Ramamurthi, S.D., et al., "Sol-Gel Ferroelectric Films for Optical Waveguides"; Ceramic Transactions vol. 25, American Ceramic Society, 1992 pp. 353-370.
Haertling, G.H., "Current Status of Thin/Thick Film Ferroelectrics"; Ceramic Transactions vol. 25, American Ceramic Society, 1992, pp. 1-18.
Lee, H.Y., et al., "Preparation of PbTiO.sub.3 Films by Chemical Vapor Deposition"; Ceramic Transactions vol. 25, American Ceramic Society, 1992, pp. 441-447.

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