Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1985-09-20
1986-09-09
Page, Thurman K.
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
65 311, 65 312, 65 320, 427162, 427163, 427166, 427167, 427168, B05D 106
Patent
active
046108920
ABSTRACT:
A method for producing a directed aerosol stream from gaseous and/or vapor phase reactants by conveying the gaseous and/or vapor phase reactants including vaporous silicon tetrachloride, water vapor, and at least one vaporous, fluorine-containing hydrocarbon to a reaction site; reacting the reactants at the reaction site in a flame-free chemical reaction to produce an aerosol composition constituted of solid silicon dioxide particles which include silicon dioxide doped with fluorine, whereby the optical index of refraction of the solid silicon dioxide particles is reduced; and causing the aerosol composition to flow as an aerosol stream from the reaction site and immediately surrounding the aerosol stream with a moving, essentially aerosol-free, gas and/or vapor stream to form a directed aerosol stream enveloped in the aerosol-free stream.
REFERENCES:
patent: 4083708 (1978-04-01), Heath et al.
patent: 4090055 (1978-05-01), King
patent: 4224046 (1980-09-01), Izawa et al.
patent: 4233045 (1980-11-01), Sarkar
patent: 4378987 (1983-05-01), Miller et al.
patent: 4440558 (1984-04-01), Nath et al.
Eisbrenner Dietrich
Merk Hans
Licentia Patent-Verwaltungs-GmbH
Page Thurman K.
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