Method for producing a diffraction grating in optical elements

Details Method for producing a diffraction grating in optical elements Method for producing a diffraction grating in optical elements

1990-01-16

1992-03-31

Lee, John D.

Optical: systems and elements

Diffraction

From grating

385 4, 385129, 430296, 430321, G02B 518

Patent

active

051012979

ABSTRACT:
A method for producing a diffraction grating in optical elements with an optical waveguide is disclosed which comprises the steps of: forming a transparent conductive film on the optical waveguide; forming an electron beam resist film on said transparent conductive film; drawing a diffraction grating pattern on said resist film with an electron beam; and developing said resist film with a diffraction grating pattern drawn thereon to form a resist film of the diffraction grating pattern.

REFERENCES:
patent: 3961102 (1976-06-01), Ballantyne et al.
patent: 4805184 (1989-02-01), Fiddyment et al.
patent: 4877717 (1989-10-01), Suzuki et al.
patent: 4900113 (1990-02-01), Hatori
patent: 4906063 (1990-03-01), Sato et al.
patent: 4929042 (1990-05-01), Hatori et al.
Urabe et al.; "Low Loss 0.9-1.9 GHz Saw Filters with Submicron Finger Period Electrodes"; Conference: 1980 Ultrasonics Symposium (Nov. 5-7, 1988); pp. 371-376.
G. Tohmon et al, SPIE vol. 898 Miniature Optics and Lasers (1988) pp. 70-75.

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