Method for producing a detector array for detection of...

Details Method for producing a detector array for detection of... Method for producing a detector array for detection of...

2005-01-04

2005-01-04

Hannaher, Constantine (Department: 2878)

Radiant energy

Invisible radiant energy responsive electric signalling

Semiconductor system

C250S36100C, C250S367000

Reexamination Certificate

active

06838674

ABSTRACT:
In a method for producing a detector array for detection of X-ray radiation, a stack is formed from a sequence of layers which are arranged one above the other in a stacking direction and are connected to one another. This results in a layer group, comprising at least one sensor layer composed of a material which is sensitive to that radiation and a separating layer, repeatedly. The stack is then broken down into slabs such that a row sequence in one slab reproduces the layer sequence in the stack. The slab is made contact with, optically or electrically, on at least one of its surface faces. The rows which are formed from the sensor layers in the slab are preferably subdivided by the introduction of separating spaces into individual sensor elements or pixels. A reflector material can be poured into the separating spaces. The method allows the production of relatively large quantities of one-dimensional or multidimensional detector arrays in a simple manner.

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