Method for processing waste gas exhausted from chemical vapor an

Details Method for processing waste gas exhausted from chemical vapor an Method for processing waste gas exhausted from chemical vapor an

1997-11-07

1999-01-05

Bushey, C. Scott

Gas separation: processes

Filtering

With cleaning of filter

55302, 55338, 95285, 96189, 96373, B01D 4604

Patent

active

058556516

ABSTRACT:
A method of processing waste gas exhausted from chemical vapor deposition equipment, which entails:

REFERENCES:
patent: 3995005 (1976-11-01), Teller
patent: 4010013 (1977-03-01), Murayama
patent: 4070162 (1978-01-01), Kober et al.
patent: 4097251 (1978-06-01), Murayama et al.
patent: 4273750 (1981-06-01), Hollett, Jr. et al.
patent: 4319890 (1982-03-01), Teller et al.
patent: 4728342 (1988-03-01), Abom
patent: 4865629 (1989-09-01), Zievers et al.
patent: 5022897 (1991-06-01), Balcar et al.

Affiliated with

Also associated with

Rating

Method for processing waste gas exhausted from chemical vapor an does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for processing waste gas exhausted from chemical vapor an, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for processing waste gas exhausted from chemical vapor an will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-858156