Method for processing substrates

Details Method for processing substrates Method for processing substrates

2011-06-07

2011-06-07

Rodríguez, Saúl J (Department: 3652)

Material or article handling

Process

Of charging load-holding or -supporting element from source...

Reexamination Certificate

active

07955044

ABSTRACT:
A method for processing substrates for a substrate processing facility includes the steps of: performing ventilation of a container with a fan filter unit while a lid of the container is in a closed state, when the container is stored in a storage shelf, and when the container is transferred with a substrate transfer device, and ventilating the container with the fan filter with the lid of the container in an open state, when substrates are transferred in a substrate loading/unloading section with the substrate transfer device.

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