Method for processing substrate, apparatus for processing...

Severing by tearing or breaking – Breaking or tearing apparatus – Combined with preliminary weakener or with nonbreaking cutter

Reexamination Certificate

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C414S763000

Reexamination Certificate

active

07845529

ABSTRACT:
A method and an apparatus process a substrate to divide a mother substrate into unit substrates. The apparatus is provided with a scribing portion for drawing a scribe line on a mother substrate, a breaking portion for breaking a mother substrate along the formed scribe line, and a portion for conveying a substrate for conveying a mother substrate or a unit substrate at least between the above described respective portions, wherein portion for conveying a substrate has a number of rotational supports and with a suction surface for sucking and holding each substrate from a main surface, rotational supports and have rotational axes, as well as suction members for respectively sucking and rotating a substrate which rotates substrates around rotational axes approximately simultaneously in such a manner that at least two main surfaces of each substrate are turned over in the upward and downward direction.

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patent: 2004/0155085 (2004-08-01), Takamatsu et al.
patent: 11-116260 (1999-04-01), None
patent: 11347779 (1999-12-01), None

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