Method for processing data based on the data context

Details Method for processing data based on the data context Method for processing data based on the data context

2008-07-01

2008-07-01

Shechtman, Sean P (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S051000, C700S083000, C700S096000, C700S121000, C702S083000, C702S182000

Reexamination Certificate

active

07395131

ABSTRACT:
A method for managing collected data in a semiconductor processing environment. The collected data can include: raw data collected during a process, trace file data received during a process, and process log file data received during a process. The raw data is synchronized with the trace file data and process log file data to create wafer data and summary data, and a file is created containing the wafer data and the summary data.

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